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Technische Universität Ilmenau: Workbench for the Nano World

Auteur(s):
Arvid Amthor (Technische Universität Ilmenau), 
Eberhard Manske (Technische Universität Ilmenau), 
Publié: dSPACE Magazine 1/2009, Mar 2009

Just as Moore’s Law predicts, the semiconductor industry is doubling the number of transistors per unit of area almost every two years. Processing such tiny structures requires precise positioning machines that move the processing tools to defined positions quickly and reproducibly. A team at the Technische Universität Ilmenau in Germany has designed a very versatile positioning machine for work in the nanometer range. The machine is controlled with the aid of dSPACE hardware and software.



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